Acceleration sensor
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United States of America Patent
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-
Feb 2, 1999
Grant Date -
N/A
app pub date -
Jul 25, 1996
filing date -
Jul 26, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A small-sized, reliable, low-cost acceleration sensor includes a working mechanism having a large joint surface. In this respect, an acceleration sensor 1 is arranged so that a diaphragm portion 2D is formed on a (100) face of a plate of single crystal silicon. The four corner portions of the joint surface 2A of a square frame are expanded in the center direction of the plate of single crystal silicon so as to form expanded portions 2B. Moreover, the (100) face of the square plate of single crystal silicon is covered with a mask having at least an octagonal opening 10E before being subjected to anisotropic etching, so that the expanded portions 2B directed to the center portion are formed in the respective four corner portions of the plate of single crystal silicon.
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