Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media
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United States of America Patent
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Feb 9, 1999
Grant Date -
N/A
app pub date -
Jul 31, 1997
filing date -
Aug 1, 1996
priority date (Note) -
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Abstract
A method of removing inorganic contamination (contamination 104 of FIGS. 2a-2b) from a layer (layer 102) overlying a substrate (substrate 100), the method comprising the steps of: removing the layer overlying the substrate with at least one removal agent; reacting the inorganic contamination with at least one conversion agent, thereby converting the inorganic contamination; removing the converted inorganic contamination by subjecting it to at least one solvent agent, the solvent agent included in a first supercritical fluid; and wherein the converted inorganic contamination is more highly soluble in the solvent agent than the inorganic contamination.
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