Non-contaminating pressure transducer module
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United States of America Patent
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Feb 9, 1999
Issued Date -
N/A
app pub date -
Dec 1, 1997
filing date -
Oct 3, 1995
priority date (Note) -
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status (Latency Note)
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Abstract
A non-contaminating pressure transducer module having an isolation member is disclosed. The isolation member isolates a pressure sensor within the transducer module from exposure to ultra high purity fluids flowing through a conduit in the module without significantly affecting the accuracy of the pressure measurement. The transducer module may be positioned within a fluid flow circuit carrying corrosive materials, wherein the pressure transducer module produces a control signal proportional to either a gauge pressure or an absolute pressure of the fluid flow circuit. The pressure transducer module of the present invention also avoids the introduction of particulate, unwanted ions, or vapors into the flow circuit.
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