Micromechanical modulator having enhanced performance
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United States of America Patent
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Feb 9, 1999
Grant Date -
N/A
app pub date -
Jul 25, 1997
filing date -
Jul 25, 1997
priority date (Note) -
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Abstract
A modulator having low insertion and a broad operating bandwidth is disclosed. The modulator has a movable membrane that is spaced from a substrate. The reflectivity of the movable membrane, and the reflectivity of the subtrate/gap interface are unequal. In particular, relative to the membrane, the substrate has a lower reflectivity. Device finesse is dictated by the lower reflectivity 'mirror,' i.e., the substrate. The substrate configuration thus provides a broad operating bandwidth while the higher reflectivity membrane provides low insertion loss.
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