US Patent No: 5,871,805
Number of patents in Portfolio can not be more than 2000
Computer controlled vapor deposition processes
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Feb 16, 1999
Issued date -
Apr 8, 1996
filing date -
08/628,088
serial no -
Expired
status
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Abstract
A method for computerized control of vapor deposition processes, including chemical vapor deposition and electron beam physical vapor deposition processes, uses optical imaging sensors and/or laser interferometers or infrared ellipsometers focused on the substrate being coated or on a nearby test blank to provide information which is computer analyzed to yield optimum control points for the coating process. A method is also disclosed for shaping or contouring one or more surfaces of an object(s) using the techniques disclosed here.
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First Claim
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International Classification(s)
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Cited Art
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| 4,385,880 Shock wave processing apparatus | 37 | 1979 | |
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| 5,403,433 Method and apparatus for monitoring layer processing | 61 | 1993 | |
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| 4,504,519 Diamond-like film and process for producing same | 152 | 1983 | |
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| 4,764,434 Diamond tools for rock drilling and machining | 83 | 1987 | |
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| 4,816,286 Process for synthesis of diamond by CVD | 94 | 1987 | |
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| 5,391,407 Process for forming protective diamond-like carbon coatings on metallic surfaces | 55 | 1994 | |
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| 5,391,409 Low temperature method for synthesizing diamond with high quality by vapor phase deposition | 30 | 1992 | |
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| 5,119,760 Methods and apparatus for material deposition | 28 | 1990 | |
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| 4,490,229 Deposition of diamondlike carbon films | 78 | 1984 | |
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| 4,725,345 Method for forming a hard carbon thin film on article and applications thereof | 102 | 1986 | |
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| 5,366,556 Process and apparatus for production of diamond-like films | 29 | 1982 | |