Method for fabricating a thin film capacitor

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United States of America Patent

PATENT NO 5872040
SERIAL NO

08862994

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method is provided for the manufacture of precision electronic components such as resistors, inductors, and capacitors on a polymer or ceramic surface. The electronic components can be deposited and trimmed to precise or matched values without having precise depositions of all of the pre-patterned materials. Thin film electronic components are deposited on a surface, parameter values are measured or estimated, a correction offset file is generated, and the components are trimmed using adaptive lithography to a very close tolerance. A computer program can be used to enable the adjustment of electronic components by techniques such as changing the physical length of an inductor coil or resistor lead, or by changing a capacitor plate area.

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Patent Owner(s)

Patent OwnerAddress
GENERAL ELECTRIC COMPANY1 RIVER ROAD SCHENECTADY NEW YORK 12345 12345

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balch, Ernest Wayne Ballston Spa, NY 24 877
Douglas, Leonard Richard Burnt Hills, NY 17 471
Downey, Evan Taylor Niskayuna, NY 3 100
Gdula, Michael Knox, NY 13 1655
Rose, James Wilson Guilderland, NY 58 1118
Wojnarowski, Robert John Ballston Lake, NY 48 2180

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