Importance

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Abstract

An apparatus for transporting substrates between a first device and at least one second device for gripping and holding substrates with a substrate holder disposed in a vacuum chamber. The first device for gripping and holding substrates is equipped with one or more movable grippers which are movable by a mechanical and/or electromechanical or magnetically operating displacement device into a position that holds or releases the substrate, and the second device for gripping and holding substrates is equipped with one or more movable grippers which are movable counter to the action of a control pressure or of a spring, into a first position and, via the action of a diaphragm that can be subjected to a pneumatic pressure and/or a vacuum pressure and an adjusting part cooperating with the diaphragm, into a second position, wherein in the one position the substrate is held and in the second position the substrate is released for further transport, and in the position of the two devices for transfer of the substrate two substrate receiving parts can be aligned and fixed coaxially with one another.

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First Claim