Leak detector with vacuum pumps and operating process for same
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United States of America Patent
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Mar 9, 1999
Grant Date -
N/A
app pub date -
May 12, 1997
filing date -
Nov 26, 1994
priority date (Note) -
Expired
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Abstract
A leak detection device includes a high vacuum pump implemented as a friction vacuum pump with two further vacuum pumps operating against atmospheric pressure. The further vacuum pumps are dry-sealing pumps in order to avoid hydrocarbon contaminations in a region of a test sample or a test chamber.
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