Electrostatic chuck capable of rapidly dechucking a substrate
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 9, 1999
Grant Date -
N/A
app pub date -
Dec 1, 1997
filing date -
Dec 1, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic chuck 20 for holding a substrate 12 comprises a dielectric 70 having a receiving surface 75 for receiving the substrate thereon. The dielectric 70 comprises a charging electrode 80 for generating electrostatic charge for electrostatically holding the substrate 12 to the receiving surface 75, and a discharge electrode 85 electrically isolated from the charging electrode for removing electrostatic charge accumulated in the chuck 20.
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