Substrate treating apparatus
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United States of America Patent
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Mar 16, 1999
Grant Date -
N/A
app pub date -
Jun 3, 1997
filing date -
Jun 5, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention is directed to a substrate treating apparatus in which a treatment is performed upon a top surface and a bottom surface of a substrate to be carried on a substrate carrying plane inclined at a certain angle to a horizontal plane in a direction normal to a substrate carrying direction. The substrate treating apparatus includes a guide plate provided below a substrate carrying plane along which a bottom surface of the substrate is to be carried; and treating liquid supply means having a first treating liquid supply member for supplying a treating liquid to a clearance defined between the bottom surface of the substrate carrying plane and the guide plate.
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