Integrated wafer pod-load/unload and mass-transfer system
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United States of America Patent
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-
Mar 23, 1999
Grant Date -
N/A
app pub date -
Mar 11, 1998
filing date -
Mar 17, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system includes an interface for receiving a pod having a carrier that receives wafers, and that is initially enclosed within a base and a pod cover. The system also includes a mechanism that transfers an exposed carrier between the interface and a platform of a mass-transfer machine included in the system. The machine includes a gantry arm for transferring the carrier between the platform and a transfer station. A retainer assembly is positionable over the carrier at the transfer station, and over a process carrier that is used in a processing tool. Moveable retainers of the assembly receive and hold wafers. The machine includes an elevator that moves between the transfer station and the process carrier. The elevator extends and retracts for transferring wafers between the retainers and either the carrier or the process carrier. A turntable, that receives the process carrier, permits automatically reorienting wafers.
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