Topographical structure of an electrostatic chuck and method of fabricating same
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United States of America Patent
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Mar 23, 1999
Grant Date -
N/A
app pub date -
Nov 5, 1996
filing date -
Nov 5, 1996
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An apparatus for retaining a workpiece and a method of fabricating same. The apparatus contains an electrostatic chuck having a workpiece support surface. The workpiece support surface has protruded regions and non-protruded regions, where a total surface area of the protruded regions is less than a total surface area of the non-protruded regions. The apparatus contains a pedestal having a surface that supports a flex circuit. The topography of the chuck is formed by either machining the surface of the pedestal prior to adhering and conforming the flex circuit to the surface or sculpting the surface of an electrode within the flex circuit.
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Cited Art Landscape
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