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Abstract

A convenient, non-optical method for scanning probe microscopy tip-to-sample distance control based on the impedance change in a shear-force dither piezo. This is accomplished by determining the tip-sample distance by measuring the impedance change in a shear-force piezo-member. A Wheatstone type bridge can be utilized to regulate the tip-sample separation. Alternatively, an electrical bridge, having an output, regulates the tip-sample separation relative to the bridge output by driving the piezo/tip with a sine wave and combining said sine wave with a phase-referenced wave of equal amplitude at a 180.degree. phase shift. The electronic bridge detects impedance changes of about -100 dB across loads with impedance phases between -90.degree. to +90. Power dissipation is determined by measuring changes in electric impedance that a dither piezo presents to an oscillator. The non-optical method of determining probe-to-sample distance of an oscillating scanning probe consists of changing the probe-to-sample distance of an oscillating scanning probe. The changes in the electro-mechanical power dissipation of the oscillating probe are then measured.

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