Thin film actuated mirror array in an optical projection system and method for manufacturing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 23, 1999
Grant Date -
N/A
app pub date -
Sep 30, 1997
filing date -
Feb 27, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Thin film AMA has a substrate having electrical wiring and a connecting terminal, an actuator formed on the substrate, a supporting element formed between the substrate and the actuator for supporting the actuator, a reflecting member formed on the actuator, and a plurality of posts formed between the actuator and the reflecting member for supporting the reflecting member. The reflecting member is supported by a first post formed on the actuator and by a second post and a third post correspondingly formed on an actuator adjacent to the actuator. So, a deflection or tilting downward of the reflecting member can be prevented so that tilting angle of the reflecting members can be made uniform. Further, as the length of the reflecting member between the first post and the second post, or between the first post and the third post is shorter, the tilting angle of the reflecting member is bigger.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully