Method of fabricating plastic mask for paste printing with an excimer laser

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United States of America Patent

PATENT NO 5887520
SERIAL NO

08579762

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of fabricating a plastic mask for paste printing with a plastic sheet being irradiated with an excimer laser beam for forming at least one penetrating opening container area including at least one through-hole in the plastic sheet is carried out by the steps of bringing a polymer film capable of absorbing at least part of the excimer laser beam into close contact with a back surface of the plastic sheet which is opposite to an excimer laser beam irradiation side thereof which is to be irradiated with the excimer laser beam; forming at least one penetrating opening containing area including at least one through-hole in the plastic sheet by irradiating the excimer laser beam irradiation side thereof with the excimer laser beam; and removing the polymer film from the plastic sheet after the formation of the penetrating opening containing area. By use of a plastic mask fabricated by the above method, a pasta printing is also carried out.

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Patent Owner(s)

Patent OwnerAddress
RICOH MICROELECTRONICS CO LTD10-3 KITAMURA TOTTORI-SHI TOTTORI 680-1172

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kinoshita, Makoto Tottori-ken, JP 68 493

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