Scanning electron microscope and its analogous device
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United States of America Patent
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Apr 13, 1999
Issued Date -
N/A
app pub date -
May 30, 1997
filing date -
Mar 17, 1995
priority date (Note) -
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status (Latency Note)
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Abstract
The device of the present invention enables high resolution observation even when a sample is tilted. A deflecting electrode device for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens is provided between the objective lens and the sample. A voltage applied to the deflecting electrode device is controlled in accordance with the tilting of a sample stage. A lateral electric field component generated on the optical axis when the sample stage is tilted is corrected by a deflected electric field generated by the deflecting electrode device. This is effective to suppress generation of astigmatism, and to allows effective arrival of an secondary electron at a secondary electron detector disposed at a position nearer the electron source side than the objective lens.
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