Sealable, transportable container adapted for horizontal loading and unloading

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United States of America Patent

PATENT NO 5895191
SERIAL NO

08518517

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Abstract

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A transportable container for storing and carrying articles such as semiconductor wafers or flat panel display substrates which is adapted for horizontal loading and unloading. The container includes a box and a box door. The box door can be sealably attached to the box to isolate the interior of the box from ambient atmospheric conditions. The container is adapted to mate with a port of a canopy which encloses a semiconductor processing apparatus.

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Patent Owner(s)

Patent OwnerAddress
ASYST TECHNOLOGIESFREMONT CA 94539

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonora, Anthony C Menlo Park, CA 117 6049
Fosnight, William J Newark, CA 106 2524

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