Semiconductor device fabricating method having a gettering step
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 20, 1999
Grant Date -
N/A
app pub date -
Oct 15, 1997
filing date -
Oct 18, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A device isolation region and a gate oxide film are formed on a front surface of a silicon substrate, with a gate electrode formed on the gate oxide film. Next, an interlayer insulator film is formed on their entire surfaces. Then, polycrystalline silicon film is grown on the rear surface of the silicon substrate. The polycrystalline silicon film is deposited in such a way as to be in contact with the rear surface of the substrate. Then, to permit the polycrystalline silicon film formed at the rear surface of the silicon substrate to getter a pollution heavy metal, a heat treatment is performed for the substrate at a temperature of 500 to 900.degree. C. After this gettering process, an interconnection line is formed on the interlayer insulator film.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully