Method and device for heating carrier bodies

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United States of America Patent

PATENT NO 5895594
SERIAL NO

08802990

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and device for heating silicon carrier bodies in a deposition reactor are by means of radiated heat. In this method, the carrier bodies are irradiated by means of a heat radiation device which emits radiation having a color temperature of at least 2000.degree. C.

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Patent Owner(s)

Patent OwnerAddress
WACKER CHEMIE GMBHHANNS-SEIDEL-PLATZ 4 MUNICH 81737

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fuchs, Paul Schalchen, AT 11 61

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