Method and apparatus for cooling the backside of a semiconductor device using an infrared transparent heat slug
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United States of America Patent
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Apr 20, 1999
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N/A
app pub date -
Dec 31, 1996
filing date -
Dec 31, 1996
priority date (Note) -
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Abstract
An apparatus and method that permits the removal of heat from the back side surface of an integrated circuit semiconductor substrate while performing optical based testing through or at the back side surface of the semiconductor substrate. In one embodiment, the present invention includes a semiconductor device having an infrared transparent heat slug attached to the back side surface of the device. Heat is removed from the semiconductor device through an infrared transparent heat slug that is then thermally cooled by a conventional cooling technique.
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