Method and apparatus for controlling substrate processing apparatus
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United States of America Patent
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Apr 27, 1999
Grant Date -
N/A
app pub date -
Oct 11, 1996
filing date -
Oct 27, 1995
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Abstract
A method and apparatus for successively conveying substrates between a plurality of processing units, the processing units processing the substrates as required where, when one of the plurality of processing units raises an alarm to inform the user of the occurrence of some abnormality, the processing and conveyance of the substrates located on the transport path in and after either an alarm-raising processing unit or a predetermined skip-mode subject unit are completed; however the conveyance is suspended for the substrates located on the transport path before either the alarm-raising processing unit or the predetermined skip-mode subject unit.
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