Method for optical inspection and lithography
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United States of America Patent
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May 4, 1999
Grant Date -
N/A
app pub date -
Jul 3, 1997
filing date -
Jul 3, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for illuminating a structured surface initially introduces a fluid into a volume, the fluid nearly completely chemically inactive with respect to the structured surface. Next, pressure and temperature are established within the volume which maintains the fluid in a supercritical state. The structured surface is then immersed in the supercritical fluid, and optical energy is directed through the supercritical fluid and onto the structured surface.
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