Electrostatic chuck with ceramic pole protection
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United States of America Patent
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-
May 18, 1999
Grant Date -
N/A
app pub date -
Apr 12, 1998
filing date -
Apr 12, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Electrostatic chucks are disclosed in which a conductive pole piece is provided with a flat top surface, sidewall and a perimeter with radiused corners connecting the top surface to the sidewall. The perimeter and sidewall are coated with a ceramic insulative material covering the radiused corners. The top surface is coated with a ceramic semiconductive material. Then the surfaces of the pole piece not covered by ceramic material are anodized in such a manner that the intersections between anodized pole surfaces and ceramic material are below the pole piece top surfaces.
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Cited Art Landscape
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