Transport device for workpieces in a vacuum system
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United States of America Patent
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-
Jun 8, 1999
Grant Date -
N/A
app pub date -
Sep 26, 1997
filing date -
Oct 15, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A device for transporting substrates through a vacuum system has a flat, parallel piped, plate-shaped substrate holder with upper and lower holder areas that are moveable in a vertical position along a transport path through the system. The upper part of the substrate holder is supported without contact and is movably guided by a magnetic arrangement.
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