Electrical inspecting apparatus with ventilation system
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United States of America Patent
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-
Jun 8, 1999
Grant Date -
N/A
app pub date -
Nov 20, 1996
filing date -
Nov 30, 1995
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electrical inspecting apparatus includes an apparatus body having a housing section for housing a cassette in which a plurality of wafers are housed, an inspecting section provided with probes for applying an electrical inspection to the wafer, and a transfer section provided with a transfer arm for transferring the wafer between the housing section and the inspecting section. The housing section, inspecting section and transfer section are arranged side by side within the apparatus body, fan filters are mounted on the apparatus body for blowing air in a lateral direction through the housing section, inspecting section and transfer section, and an exhaust duct is mounted on the apparatus body for discharging the air flowing through the sections to the outside of the apparatus body.
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