Integrated hybrid silicon-based micro-reflector
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United States of America Patent
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Jun 8, 1999
Grant Date -
N/A
app pub date -
Apr 16, 1998
filing date -
Apr 16, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A light reflective device including an insulative substrate; a silicon wafer positioned over the insulative substrate and defining an opening and having a flexible beam portion having top and bottom surfaces which extend into the opening; a layer of ferromagnetic material formed over the top surface of the flexible beam portion; a reflector formed over the ferromagnetic layer on the top surface of the flexible beam portion; and a micro-electromagnet mounted on the insulative substrate relative to the opening of the silicon wafer and adapted to produce a magnetic field in response to an applied current which acts on the ferromagnetic layer to cause the bending of the flexible beam portion, ferromagnetic layer and reflector.
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