Method and apparatus for making a micro device
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United States of America Patent
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Jun 15, 1999
Grant Date -
N/A
app pub date -
May 15, 1997
filing date -
May 15, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180.degree. to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.
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