Double-cavity micromechanical optical modulator with plural multilayer mirrors
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United States of America Patent
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Jun 22, 1999
Grant Date -
N/A
app pub date -
Jan 28, 1998
filing date -
Jan 28, 1998
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A mechanical modulator is provided that includes a conductive substrate and at least three multilayer mirrors disposed on the substrate. The mirrors are spaced apart from one another to define upper and lower optical cavities. The upper cavity is formed by an airgap having a variable thickness. The multilayer mirror located above the airgap includes a conductive membrane having an optically transparent portion and a flexible support for orienting the membrane in a first position. Under the action of a bias, the membrane moves to a second position, changing the air gap by a fraction of a wavelength of the optical signal, as measured in air. The change in position of the membrane from the first to the second position causes a change in the total reflectivity of the modulator from a minimum to a maximum value.
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