Substrate processing apparatus
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United States of America Patent
Stats
-
Jun 29, 1999
Grant Date -
N/A
app pub date -
Jun 25, 1997
filing date -
Jun 28, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first transportation mechanism movable along a first transportation path in a predetermined transportation direction; a cassette load portion provided on one side of the transportation path; a plurality of unit portions arranged in a direction crossing the transportation direction on the other side of the first transportation path; and a second transportation mechanism disposed between each two adjacent unit portions and movable along a second transportation path in the transportation direction. The first transportation mechanism can perform a substrate transferring operation with respect to a cassette placed on the cassette load portion and a processing unit in a unit portion disposed in closest proximity to the first transportation path among the plurality of unit portions. The second transportation mechanism can perform a substrate transferring operation with respect to any processing units included in unit portions disposed on opposite sides of the second transportation path.
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