Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect
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United States of America Patent
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Jun 29, 1999
Issued Date -
N/A
app pub date -
Jan 11, 1996
filing date -
Jan 12, 1995
priority date (Note) -
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status (Latency Note)
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Abstract
An electrostatic chuck including a pedestal having a conductive upper surface; and a layer of plasma-sprayed material formed on the upper surface of the pedestal and defining a surface onto which a substrate is placed during use, wherein the plasma-sprayed material exhibits the Johnson-Rahbeck effect when a bias is applied between the substrate and the pedestal.
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Cited Art Landscape
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