Importance

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Abstract

A capacitive sensor element for pressure sensors comprising a house part based on an electrically insulating material such as glass ceramic material and having on an interior surface a first capacitor plate. An opposing capacitor plate is attached to one side of a diaphragm of an electrically insulating material, which on its other side has an electrically conductive shielding layer that is intended to be connected to ground. The capacitor plates form an electrical capacitor, the capacitance of which is changed when the distance between the plates varies. A second electrically conductive shielding layer is preferably surrounded by the insulating material in the house part between a shielding plate and a thick support plate at a distance from the first capacitor plate. The second shielding layer is also intended to be connected to ground. By arranging the second shielding layer near the capacitor plates they are ensured a uniform electrical surrounding for reduction of the influence of stray capacitances. Further, the thick support plate gives the house part a good mechanical stability.

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First Claim