US Patent No: 5,920,015

Number of patents in Portfolio can not be more than 2000

Pressure sensor with capacitor electrodes and shield layer parallel thereto

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Importance

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Abstract

A capacitive sensor element for pressure sensors comprising a house part based on an electrically insulating material such as glass ceramic material and having on an interior surface a first capacitor plate. An opposing capacitor plate is attached to one side of a diaphragm of an electrically insulating material, which on its other side has an electrically conductive shielding layer that is intended to be connected to ground. The capacitor plates form an electrical capacitor, the capacitance of which is changed when the distance between the plates varies. A second electrically conductive shielding layer is preferably surrounded by the insulating material in the house part between a shielding plate and a thick support plate at a distance from the first capacitor plate. The second shielding layer is also intended to be connected to ground. By arranging the second shielding layer near the capacitor plates they are ensured a uniform electrical surrounding for reduction of the influence of stray capacitances. Further, the thick support plate gives the house part a good mechanical stability.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MKS INSTRUMENTS, INC.WILMINGTON, MA421

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hallberg, Nils Gunno Atvidaberg, SE 2 21
Jonsson, Staffan Karlskoga, SE 10 84

Cited Art

Patent Info (Count) # Cites Year
 
Vaisala Oy (2)
4,628,403 Capacitive detector for absolute pressure 32 1985
4,831,492 Capacitor construction for use in pressure transducers 26 1988
 
Allied Signal (1)
5,189,591 Aluminosilicate glass pressure transducer 33 1992
 
CELERITY, INC. (1)
4,823,603 Capacitance manometer having stress relief for fixed electrode 35 1988
 
Johnsson & Billquist Development AB (1)
4,935,841 Pressure sensor 14 1989

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
MKS INSTRUMENTS, INC. (8)
6,993,973 Contaminant deposition control baffle for a capacitive pressure transducer 3 2003
7,201,057 High-temperature reduced size manometer 2 2004
7,141,447 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 1 2004
7,284,439 Method for producing a pressure sensor for detecting small pressure differences and low pressures 2 2004
7,204,150 Turbo sump for use with capacitive pressure sensor 1 2005
7,389,697 Pressure sensor for detecting small pressure differences and low pressures 0 2005
7,624,643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor 1 2006
7,316,163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 3 2006
 
PROMINENT DOSIERTECHNIK GMBH (1)
6,935,180 Sensor diaphragm 0 2004
 
STEC, INC. (1)
6,837,112 Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis 3 2003
 
TEXAS INSTRUMENTS INCORPORATED (1)
6,209,398 Fluid pressure transducer apparatus and method for assembling 21 1998