Surface acoustic wave device
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United States of America Patent
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-
Jul 6, 1999
Grant Date -
N/A
app pub date -
Jul 15, 1997
filing date -
Jul 18, 1996
priority date (Note) -
In Force
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Abstract
A surface acoustic wave device is disclosed which includes a piezoelectric substrate upon which a surface wave propagation film, which is comprised of a diamond-like carbon or aluminum nitride film, is provided.
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