Microelectromechanical television scanning device and method for making the same
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United States of America Patent
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Jul 6, 1999
Issued Date -
N/A
app pub date -
Apr 24, 1996
filing date -
Jul 19, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A single reflector, two-axis MEMS scanner made of a substrate. The substrate has nested, cut-out regions. Each region is independently rotatable about one of the axes. The axes of the regions are substantially orthogonal.
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Cited Art Landscape
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