Completely encapsulated top electrode of a ferroelectric capacitor
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United States of America Patent
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Jul 6, 1999
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N/A
app pub date -
Aug 20, 1996
filing date -
Aug 20, 1996
priority date (Note) -
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Abstract
A ferroelectric capacitor includes a bottom electrode, a top electrode, and a ferroelectric layer located between the top and bottom electrodes that extends to completely encapsulate the top electrode, except for a contact hole to allow metalization of the top electrode. The total encapsulation of the top electrode reduces the sensitivity of the ferroelectric capacitor to hydrogen and thus improves electrical switching performance.
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