Vacuum package having vacuum-deposited local getter and its preparation
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United States of America Patent
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-
Jul 13, 1999
Grant Date -
N/A
app pub date -
Jun 11, 1997
filing date -
Jun 11, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum package (20) is fabricated by providing a package base (22) with a device (32) affixed to the interior of the package base (22), and a package lid (42). An activatable getter material (54) is deposited onto a preselected region of either the interior (48) of the package lid (42) or that portion of the package base (22) which does not have the device (32) affixed thereto. The deposited getter material (54) is deposited at a temperature such that it is activated during deposition. The vacuum package lid (42) is sealed to the vacuum package base (22). The steps of depositing and sealing are conducted in an evacuated vacuum chamber without exposing the interior to atmosphere.
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