Substrate holding system and exposure apparatus using the same
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United States of America Patent
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Jul 13, 1999
Grant Date -
N/A
app pub date -
Jan 27, 1997
filing date -
Jan 31, 1996
priority date (Note) -
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Abstract
A substrate holding system for holding a substrate by attraction through a negative pressure, has protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around the primary protrusions, and an arrangement for reducing a local change in shape of the substrate in a portion around the primary protrusion as the substrate is attracted by the negative pressure.
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