Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper
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United States of America Patent
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Jul 13, 1999
Grant Date -
N/A
app pub date -
Feb 28, 1997
filing date -
Mar 7, 1996
priority date (Note) -
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Abstract
A discharge electrode for an excimer laser oscillator according to the present invention contains oxygen at a content of not more than 10 ppm, and a method of restoring the shape of a discharge electrode according to the present invention comprises introducing an inert gas into a laser chamber, and conducting discharge for several seconds.
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