Method and apparatus for constant composition delivery of hydride gases for semiconductor processing

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Jul 20, 1999
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Dec 6, 1996
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Dec 6, 1995

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Abstract

Described are methods and apparatuses for the electrochemical generation and constant concentration delivery of high purity gases used in the production of semiconductors and the doping of semiconductors.

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VERSUM MATERIALS US LLC	8555 SOUTH RIVER PARKWAY TEMPE AS 85284

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C25B:ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE ....

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Inventor Name	Address	# of filed Patents	Total Citations
Ayers, William M	Princeton, NJ	16	164

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Method and apparatus for constant composition delivery of hydride gases for semiconductor processing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

08761563

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08761563

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