Capacitive differential pressure detector

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5925824
SERIAL NO

08884355

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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In a capacitive differential pressure detector, an insulating plate (1) of a fixed electrode is covered with a gold conductive film. A conductive film (2) integrally includes an entire inner area (2a) of a center hole (1a), a square ring-shaped area (2b) surrounding the center hole (1a) on the side opposite to the conductive plate (12) and a band-shaped area (2c) extending therefrom in a centrifugal direction to reach the outer periphery. The conductive film (2) is electrically communicated with the conductive plate at the terminating position of the entire inner area (2a) and also with aluminum films at the terminating position of the band-shaped area (2c). Therefore, the total area of the ring-shaped area (2b) and the band-shaped area (2c) can be decreased so that Cs1+Cs2 is decreased to improve the static pressure span characteristic.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
FUJI ELECTRIC CO., LTD.TOKYO1844

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Kimihiro Kanagawa, JP 8 127
Soma, Shinichi Kanagawa, JP 1 13
Yuhara, Tadanori Kanagawa, JP 3 37

Cited Art Landscape

Patent Info (Count) # Cites Year
 
FUJI ELECTRIC CO., LTD. (1)
* 5056369 Capacitive differential pressure detector 18 1990
 
Leeds & Northrup Company (1)
* 4390925 Multiple-cavity variable capacitance pressure transducer 25 1981
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
MKS INSTRUMENTS, INC. (12)
6568274 Capacitive based pressure sensor design 42 2000
6772640 Multi-temperature heater for use with pressure transducers 20 2000
6993973 Contaminant deposition control baffle for a capacitive pressure transducer 6 2003
* 2004/0226,382 CONTAMINANT DEPOSITION CONTROL BAFFLE FOR A CAPACITIVE PRESSURE TRANSDUCER 0 2003
7201057 High-temperature reduced size manometer 3 2004
7141447 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 2 2004
7284439 Method for producing a pressure sensor for detecting small pressure differences and low pressures 8 2004
7204150 Turbo sump for use with capacitive pressure sensor 1 2005
7389697 Pressure sensor for detecting small pressure differences and low pressures 5 2005
* 2006/0000,289 Pressure sensor for detecting small pressure differences and low pressures 2 2005
7624643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor 5 2006
7316163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 6 2006
 
ENDRESS + HAUSER GMBH + CO. KG (2)
* 7249515 Capacitive pressure sensor 4 2003
* 2006/0185,435 Capacitive pressure sensor 0 2003
 
FREYSSINET INTERNATIONAL (STUP) (1)
* 2002/0113,231 Method for demounting a prestressing cable, and device for carrying it out 0 2001
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
9249008 MEMS device with multiple electrodes and fabricating method thereof 1 2013
 
KOREA ELECTRONICS TECHNOLOGY INSTITUTE (1)
6651506 Differential capacitive pressure sensor and fabricating method therefor 27 2002
* Cited By Examiner