US Patent No: 5,925,824

Number of patents in Portfolio can not be more than 2000

Capacitive differential pressure detector

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Importance

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Abstract

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In a capacitive differential pressure detector, an insulating plate (1) of a fixed electrode is covered with a gold conductive film. A conductive film (2) integrally includes an entire inner area (2a) of a center hole (1a), a square ring-shaped area (2b) surrounding the center hole (1a) on the side opposite to the conductive plate (12) and a band-shaped area (2c) extending therefrom in a centrifugal direction to reach the outer periphery. The conductive film (2) is electrically communicated with the conductive plate at the terminating position of the entire inner area (2a) and also with aluminum films at the terminating position of the band-shaped area (2c). Therefore, the total area of the ring-shaped area (2b) and the band-shaped area (2c) can be decreased so that Cs1+Cs2 is decreased to improve the static pressure span characteristic.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
FUJI ELECTRIC CO., LTD.TOKYO2443

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Kimihiro Kanagawa, JP 8 118
Soma, Shinichi Kanagawa, JP 1 12
Yuhara, Tadanori Kanagawa, JP 3 35

Cited Art Landscape

Patent Info (Count) # Cites Year
 
FUJI ELECTRIC CO., LTD. (1)
5,056,369 Capacitive differential pressure detector 17 1990
 
Leeds & Northrup Company (1)
4,390,925 Multiple-cavity variable capacitance pressure transducer 25 1981

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
MKS INSTRUMENTS, INC. (10)
6,568,274 Capacitive based pressure sensor design 36 2000
6,772,640 Multi-temperature heater for use with pressure transducers 17 2000
6,993,973 Contaminant deposition control baffle for a capacitive pressure transducer 3 2003
7,201,057 High-temperature reduced size manometer 2 2004
7,141,447 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 1 2004
7,284,439 Method for producing a pressure sensor for detecting small pressure differences and low pressures 4 2004
7,204,150 Turbo sump for use with capacitive pressure sensor 1 2005
7,389,697 Pressure sensor for detecting small pressure differences and low pressures 1 2005
7,624,643 Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor 2 2006
7,316,163 Method of forming a seal between a housing and a diaphragm of a capacitance sensor 4 2006
 
ENDRESS + HAUSER GMBH + CO. KG (1)
7,249,515 Capacitive pressure sensor 0 2003
 
KOREA ELECTRONICS TECHNOLOGY INSTITUTE (1)
6,651,506 Differential capacitive pressure sensor and fabricating method therefor 16 2002