Importance

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Abstract

A probe card comprises a base having a frame portion to define an opening portion therein and having a lower surface, and first and second resin fixing portions mounted on the lower surface of the frame portion and remote from each other to define a channel therebetween. The first resin fixing portion supports upper- and lower-level probe needle groups such that their intermediate portions are electrically insulated from each other, that distal end portions of the upper-level probe group are exposed to the opening portion of the base, and that distal end portions of the lower-level probe needle group are exposed to the channel. The second resin fixing portion supports intermediate portions of the upper-level probe needle group to be electrically insulated from each other. Needle point groups of the respective probe needle groups are brought into contact with electrodes of a plurality of rows.times.a plurality of columns of semiconductor elements on an inspection target body simultaneously, thereby performing inspection of electrical characteristics of the plurality of semiconductor elements simultaneously.

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First Claim