US Patent No: 5,926,257
Number of patents in Portfolio can not be more than 2000
Illumination optical system and exposure apparatus having the same
Stats
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Jul 20, 1999
Issued date -
Jul 22, 1997
filing date -
08/898,576
serial no -
In Force
status
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Abstract
An illumination optical system includes a first diffraction optical element, a second diffraction optical element and a condenser lens. The first diffraction optical element has a plurality of micro diffraction optical elements, which have a first optical power in a first direction and an optical power different from the first optical power in a second direction, perpendicular to the first direction. The second diffraction optical element has a plurality of micro diffraction optical elements, which have a second optical power in the second direction and an optical power different from the second optical power in the first direction. The first optical power is different from the second optical power. Light supplied from a light source forms a plurality of secondary light sources by passing through the first and second diffraction optical elements. Light from the secondary light sources passing through the condenser lens generates Kohler illumination on a surface to be irradiated.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 4,617,469 Exposure apparatus with detecting means insertable into an exposure path | 15 | 1983 | |
| 4,659,225 Pattern exposure apparatus with distance measuring system | 32 | 1985 | |
| 4,682,885 Illumination apparatus | 54 | 1986 | |
| 4,851,882 Illumination optical system | 48 | 1988 | |
| 4,874,954 Projection exposure apparatus | 31 | 1989 | |
| 4,974,919 Illuminating device | 111 | 1989 | |
| 5,153,773 Illumination device including amplitude-division and beam movements | 99 | 1990 | |
| 5,263,250 Method of manufacturing nozzle plate for ink jet printer | 54 | 1991 | |
| 5,091,744 Illumination optical system | 42 | 1991 | |
| 5,121,160 Exposure method and apparatus | 59 | 1991 | |
| 5,828,496 Illumination optical system | 5 | 1994 | |
| 5,719,617 Illumination system for superposing light beams one upon another on a surface using a projecting system having different focal point positions | 12 | 1995 | |
| 5,699,148 Exposure apparatus and microdevice manufacturing method using the same | 13 | 1996 | |
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| 4,939,630 Illumination optical apparatus | 85 | 1988 | |
| 5,097,291 Energy amount control device | 140 | 1991 | |
| 5,245,384 Illuminating optical apparatus and exposure apparatus having the same | 82 | 1992 | |
| 5,335,044 Projection type exposure apparatus and method of exposure | 40 | 1993 | |
| 5,798,824 Exposure apparatus correcting illuminance distribution | 10 | 1995 | |
| 5,745,294 Illuminating optical apparatus | 18 | 1996 | |
| 5,815,248 Illumination optical apparatus and method having a wavefront splitter and an optical integrator | 20 | 1997 | |
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| 5,695,274 Illuminating optical system for use in projecting exposure device | 6 | 1995 | |