Light valve target comprising electrostatically-repelled micro-mirrors
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United States of America Patent
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Jul 20, 1999
Issued Date -
N/A
app pub date -
Apr 29, 1998
filing date -
Apr 18, 1997
priority date (Note) -
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Abstract
A high intensity light modulator includes a micro-mirror light valve target with electrostatically-repelled micro-mirror elements. Each micro-mirror of the target array comprises a base electrode and an overlying micro-mirror element. In operation, charge is deposited upon the micro-mirrors to produce repulsive electrostatic forces that outwardly deflect the micro-mirror elements by an amount proportional to the deposited charge. In one embodiment, an array of micro-mirror light valves is formed directly upon the face plate of a vidicon tube and is addressed using a scanning electron gun.
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