Selection device for providing one or the other of two gases to an apparatus
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United States of America Patent
Stats
-
Jul 27, 1999
Grant Date -
N/A
app pub date -
Nov 19, 1996
filing date -
Nov 5, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A selection device for delivering one of two gases to an apparatus includes an apparatus having an inlet and an outlet, and a gas delivery line connected to the inlet of the apparatus. A first feed line and a second feed line for respectively feeding a first and a second gas are provided. A first purge line and a second purge line are also provided, the first feed line being connected to the first purge line and the second feed line being connected to the second purge line. A common connection line connects the first and the second feed lines to the gas delivery line. An additional purge line is connected to the outlet of the apparatus. A first element, a second element, and a third element for creating a pressure drop are disposed in the first, the second, and the additional purge lines, respectively, the first element for creating a pressure drop and the third element for creating a pressure drop being flow-regulating elements, the second element for creating a pressure drop being a backpressure regulator. The common gas delivery line is only connected to the common connection line and to the apparatus.
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