Method for testing an integrated circuit device
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United States of America Patent
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Jul 27, 1999
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N/A
app pub date -
Mar 11, 1998
filing date -
Dec 31, 1996
priority date (Note) -
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Abstract
A method for testing an integrated circuit situated on the top of a semiconductor substrate. The method includes the steps of focusing a photon onto a portion of the integrated circuit through an anti-reflective coating disposed on the back side of the semiconductor substrate and detecting the photon after the photon is reflected from the integrated circuit.
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