Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system
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United States of America Patent
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Aug 3, 1999
Grant Date -
N/A
app pub date -
Jun 3, 1997
filing date -
Jun 4, 1996
priority date (Note) -
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Importance
Abstract
A puller apparatus for a Czochralski crystal puller system is provided which includes a primary puller chuck and a secondary puller chuck. The primary puller chuck is attached to a seed crystal. The secondary puller chuck is shaped to enclose and retain a portion of a growing crystal so that the growing crystal can be pulled by the secondary puller chuck.
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