Heated pressure transducer assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5932332
SERIAL NO

08863547

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The disclosed pressure transducer assembly includes an external enclosure, a thermal shell disposed within the external enclosure, and a pressure sensor disposed within the thermal shell. The pressure sensor senses the gas or vapor pressure present in a tube coupling the sensor to a source of pressurized gas or vapor. The assembly includes a device for heating the thermal shell, and thermal insulation is disposed between the thermal shell and the external enclosure. The thermal insulation includes a plurality of metalized high temperature films stacked one on top of another and a plurality of spacer layers, each of the spacer layers being disposed between adjacent ones of the metalized high temperature films.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Navarro, Paul W Melrose, MA 2 47
Pandorf, Robert C Newton Highlands, MA 6 144

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