Importance

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Abstract

The invention relates to a micro-mechanical device for determining the oxygen content in a gas mixture or gas matrix including a dumbbell-shaped element having a base plate and two volumes of the gas to be measured arranged on opposing sides of a center portion of the base plate. The center portion of the base plate is held by a clamping band which is torsionally held such that the base plate rotates about the center portion. A mirror element on the base plate is used to determine a rotational position of the base plate and a compensation coil for conducting current and creating a rotational force to counter any rotation by the base plate is arranged on the dumbell-shaped element. The dumbbell-shaped gas volumes, mirror and compensation coils are integrated as a coherent structural unit on a base plate in silicon micro-mechanical design, or the dumbbell-shaped gas volumes comprise a photo-active glass base plate and two cover plates bonded thereto and be embodied, together with the mirror and compensation coils, as a coherent structural unit.

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First Claim