Method and system for detecting material using piezoelectric resonators
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United States of America Patent
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Aug 3, 1999
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app pub date -
Jun 30, 1997
filing date -
Jun 30, 1997
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Abstract
A method and system for detecting material bound on a surface of a piezoelectric resonator introduces a signal of a constant frequency through the sensing resonator and detects a change in the insertion phase shift of the resonator as a result of the binding of the material being detected on the surface of the resonator. Environmental effects on the measurement are effectively canceled by the use of a reference resonator driven by the same input signal. A multiple-port sensing device is provided which includes thin-film sensing and reference resonators monolithically formed on a substrate.
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