Pod loader interface improved clean air system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Aug 10, 1999
Grant Date -
N/A
app pub date -
Feb 1, 1998
filing date -
Feb 1, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A fan is attached directly adjacent to a clean air filter sealing an air inlet under a horizontal portion of a plenum chamber below a vertically movable loading platform which all move as a unit. A vertical portion of the plenum chamber, trapezoidal in cross-section, communicates with a wafer pod on the loading platform through an angled perforated grill sealing an air outlet from the vertical portion of the plenum chamber. Clean air flows evenly throughout the entire height of an angled perforated grill over the surfaces of the wafers. Mechanisms lift the pod cover and load and unload the wafer carrier.
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