Multilayer ultrasonic transducer array including very thin layer of transducer elements
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United States of America Patent
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Aug 17, 1999
Grant Date -
N/A
app pub date -
May 5, 1997
filing date -
May 5, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An ultrasonic transducer array having a plurality of transducer elements, at least some of which have multiple piezoelectric and electrode layers. The resonant frequency of the transducer elements may range from 500 kHz to 300 MHz or more. A single array may have transducer elements of different resonant frequencies, and the array may be sparsely populated. Highest frequencies are typically obtained when the piezoelectric layers are made from vapor deposited PZT in accordance with a disclosed deposition process. The array may have a 1-D configuration, 1.5-D or 2-D, configuration. The array may be positioned in a probe.
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